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DPS系列干式螺桿真空泵特點(diǎn)：
排氣路徑短，減少反應(yīng)物沉積/Exhaust Path Is Short, Reduce The Deposition Of Reactants.
●干式螺旋真空泵相較于其他形式的真空泵，因氣體于泵浦內(nèi)的傳輸路徑更短，更不易產(chǎn)生反應(yīng)物沉積的現(xiàn)象/Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.
線形密封性佳，泵浦性能更優(yōu)/The Optimal Linear Sealing, The Pump Performance
●專利轉(zhuǎn)子密封線形，轉(zhuǎn)子密封性佳，轉(zhuǎn)子能以較大的嚙合間隙達(dá)到更快的抽氣效果。由于嚙合間隙較大，泵浦較不易因制程氣體沉積而卡死，轉(zhuǎn)子也較不易因麿耗而需更換/Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.
結(jié)構(gòu)簡單，故障率低，維修容易/Simple Structure, Low Fault Rate And Easy Maintenance
●螺旋式真空泵因需利用一對轉(zhuǎn)子互相嚙合達(dá)到密封效果，結(jié)構(gòu)上不像其他形式的真空泵需要有中 間隔板的設(shè)計(jì)，降低轉(zhuǎn)子與隔板沉積卡死的風(fēng)險(xiǎn)。且因其結(jié)構(gòu)單純，拆解維修也較容易，因此能 縮短維修時(shí)程，降低維修費(fèi)用/Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.
微電腦操作，遠(yuǎn)端監(jiān)控，保護(hù)周全/Microcomputer Operation, Remote Monitoring, Considerate Protection
●微電腦操控器提供真空泵浦更簡單的操作方式并能顯示泵浦完整的運(yùn)轉(zhuǎn)狀態(tài)，方便使用者對泵浦 應(yīng)用狀況進(jìn)行調(diào)整，在泵浦產(chǎn)生問題前進(jìn)行預(yù)防保養(yǎng)。遠(yuǎn)端監(jiān)控系統(tǒng)能提供使用者方便的監(jiān)控工具，使用者不需到現(xiàn)場即能查詢泵浦之運(yùn)轉(zhuǎn)狀況/Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.
性能優(yōu)勢：
●專用冷卻液冷卻，避免了冷卻水可能對殼體造成腐蝕/Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.
●移動(dòng)式操作界面，方便操作；顯示真空泵實(shí)際工作狀況，并可選中英兩種文字顯示，切實(shí)貼近客戶/Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.
●軍規(guī)電源接頭，安全方便/Catch the power connector, safe and convenient.
●氮?dú)饧訜崞?，使真空泵更適應(yīng)于CVD、PECVD等半導(dǎo)體制程/The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.
●控制訊號及通訊信號接口，可對真空泵進(jìn)行遠(yuǎn)端監(jiān)控/The control signals and communication signal interface, remote monitoring was carried out on the vacuum pump.
|
型 號 Model |
單位 |
單機(jī)Pump Unit |
機(jī)組Pump Set |
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|---|---|---|---|---|---|---|---|---|---|
| DPS80 | DPS160 | DPS180 | DPS602 | DPS902 | DPS1302 | DPS1802 | |||
| 抽速(50HZ/60HZ) | L/min | 1300/1600 | 2150/2600 | 2500/3000 | 8300/10000 | 12500/15000 | 17500/20000 | 25000/33300 | |
| m³/hr | 80/96 | 140/156 | 150/180 | 500/600 | 750/900 | 1050/1260 | 1500/1800 | ||
| cfm | 48/57 | 82/92 | 88/105 | 294/353 | 441/530 | 618/742 | 883/1060 | ||
| 終極壓力 | Torr | ≤7.5*10-3 | ≤7.5*10-4 | ||||||
| mbar | ≤1*10-2 | ≤1*10-3 | |||||||
| Pa | ≤1 | ≤0.1 | |||||||
| 馬達(dá) | 頻率 | HZ | 50/60 | ||||||
| 電壓 | V | 220～440 | |||||||
| 功率 | Hp | 4 | 6 | 6 | 4+4 | 6+4 | 6+6 | 6+6 | |
| KW | 2.98 | 4.47 | 4.47 | 2.98+2.98 | 4.47+2.98 | 4.47+4.47 | 4.47+4.47 | ||
| 連接 | 進(jìn)氣口 | NW50 | ISO100 | ISO160 | |||||
| 排氣口 | NW40 | ||||||||
| 冷卻水 | 流量 | L/min | 3～7 | ||||||
| 壓力 | kg/cm2 | 2.0～4.0 | |||||||
| 溫度 | ℃ | 18～30 | 15～30 | ||||||
| 接頭 | RC3/82 | ||||||||
| 氮?dú)釴2 | 壓力 | Mpa | 0.15～0.2/td> | ||||||
| 稀釋流量 | L/min | 0-60 | |||||||
| 密封流量 | L/min | 0-20 | |||||||
| 接頭 | Swagelok1/42 | ||||||||
| 尺寸(L×W×H) | mm | 814×380×663 | 895×405×678 | 920×425×650 | 814×380×865 | 895×380×915 | 920×430×957 | 920×430×1030 | |
| 重量 | kg | 280 | 300 | 320 | 450 | 520 | 540 | 545 | |
| 噪音 | dB(A) | ≤68 | ≤70 | ≤70 | ≤70 | ≤70 | ≤70 | ≤70 | |
|
備注：1、以上噪音值為搭配水冷電機(jī)無外罩之噪音值。2、以上機(jī)型如裝隔音裝置可再有效降低噪音3～4分貝 Note：1、above the noise value is with water-cooled motor no outer garment of noise value.2、the above models,such as sound insulation devioe can effectively redoue the noise 3-4db. |
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| 控制界面 | SEMI E73-0299 | ||||||||
| 室溫操作范圍 | ℃ | 5～40 | |||||||
| 更大操作濕度 | RH | 90%以上Above | |||||||
性能曲線
說明：
德耐爾對產(chǎn)品不斷改進(jìn)，保有設(shè)計(jì)變更權(quán)，如有更改，恕不另行通知
應(yīng)用領(lǐng)域：
●醫(yī)療行業(yè)/The health care industry.
●照明行業(yè)/Lighting industry.
●各種分析儀器/A variety of analytical instruments.
●電子、半導(dǎo)體行業(yè)/Electronics, semiconductor industry.
●電力行業(yè)/The power industry.
●制冷行業(yè)/Refrigeration industry.
采購 ：DPS系列干式螺桿真空泵
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